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標(biāo)準(zhǔn)樣品
2D200
Lateral-(XY)-Calibration Standard
The standard (2D200) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 200nm pitch etched into a silicon chip. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS? will mediate a contract between the customer and PTB. Please ask for details.
Features:
200 nm pitch
high accuracy
2D300
Lateral-(XY)-Calibration Standard
The standard (2D300) is used for a very precise x-y-calibration of the scanning mechanism. The standard consists of a 2-dimensional lattice of inverted square pyramids with 300nm pitch etched into a silicon chip. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. NANOSENSORS? will mediate a contract between the customer and PTB. Please ask for details.
Features:
300 nm pitch
high accuracy
H8
Height Standard with 8 nm nominal stepheight
The standard (H8) is used for a very precise z-calibration of the scanning mechanism. The standard consists of multiple areas of hole and stripe arrays etched into silicon. A calibration certificate of PTB (Physikalisch Technische Bundesanstalt) is only available on special request. Please ask for terms and delivery.
Features:
small step height
