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1A

Rotated

17 μm(15 - 19 μm)*

15 μm(10 - 20 μm)*

< 10 nm

20°-25°   front view 25°-30° from side 10° at the apex

2B

Rotated

17 μm(15 - 19 μm)*

15 μm(10 - 20 μm)*

< 10 nm

20°-25°   front view 25°-30° from side 10° at the apex

3C

Rotated

17 μm(15 - 19 μm)*

15 μm(10 - 20 μm)*

< 10 nm

20°-25°   front view 25°-30° from side 10° at the apex

4D

Rotated

17 μm(15 - 19 μm)*

15 μm(10 - 20 μm)*

< 10 nm

20°-25°   front view 25°-30° from side 10° at the apex

1A

Beam

500 μm(490 - 510 μm)*

30 μm(25 - 35 μm)*

2.7 μm(1.7 - 3.7 μm)*

0.2 N/m(0.04 - 0.7 N/m)*

15 kHz(10 - 20 kHz)*

2B

Beam

210 μm(200 - 220 μm)*

30 μm(25 - 35 μm)*

2.7 μm(1.7 - 3.7 μm)*

2.7 N/m(0.4 - 10 N/m)*

80 kHz(50 - 110 kHz)*

3C

Beam

150 μm(140 - 160 μm)*

30 μm(25 - 35 μm)*

2.7 μm(1.7 - 3.7 μm)*

7.4 N/m(1 - 29 N/m)*

150 kHz(70 - 230 kHz)*

4D

Beam

100 μm(90 - 110 μm)*

50 μm(45 - 55 μm)*

2.7 μm(1.7 - 3.7 μm)*

40 N/m(7 - 160 N/m)*

350 kHz(200 - 500 kHz)*